U11	U22	U33	U12	U13	U23
Cl1	0.0498 (4)	0.0352 (3)	0.0327 (3)	−0.0051 (3)	0.0117 (3)	0.0097 (2)
Cl2	0.0453 (3)	0.0310 (3)	0.0314 (3)	−0.0010 (2)	0.0092 (2)	0.0116 (2)
Cl3	0.0490 (3)	0.0387 (3)	0.0311 (3)	0.0160 (3)	0.0107 (3)	0.0180 (2)
Cl4	0.0500 (4)	0.0509 (4)	0.0361 (3)	0.0186 (3)	0.0126 (3)	0.0265 (3)
O1	0.0532 (10)	0.0367 (9)	0.0316 (8)	0.0031 (8)	0.0210 (8)	0.0102 (7)
O2	0.0398 (9)	0.0382 (8)	0.0290 (8)	0.0011 (7)	0.0142 (7)	0.0139 (7)
O3	0.0433 (9)	0.0379 (8)	0.0292 (8)	0.0064 (7)	0.0169 (7)	0.0104 (7)
O4	0.0431 (9)	0.0355 (8)	0.0282 (8)	0.0033 (7)	0.0172 (7)	0.0119 (7)
O5	0.0533 (10)	0.0417 (9)	0.0305 (8)	0.0177 (8)	0.0226 (8)	0.0181 (7)
O6	0.0396 (9)	0.0368 (8)	0.0322 (8)	0.0112 (7)	0.0112 (7)	0.0123 (7)
O7	0.0490 (10)	0.0388 (9)	0.0289 (8)	0.0111 (7)	0.0183 (7)	0.0145 (7)
O8	0.0428 (9)	0.0399 (9)	0.0348 (9)	0.0173 (7)	0.0156 (8)	0.0168 (8)
N1	0.0418 (11)	0.0349 (9)	0.0277 (9)	0.0021 (8)	0.0118 (8)	0.0127 (8)
N2	0.0492 (12)	0.0501 (12)	0.0346 (10)	0.0079 (10)	0.0168 (10)	0.0210 (10)
N3	0.0393 (10)	0.0356 (10)	0.0286 (9)	0.0110 (8)	0.0114 (9)	0.0127 (9)
N4	0.0495 (12)	0.0425 (11)	0.0331 (10)	0.0096 (9)	0.0152 (10)	0.0139 (9)
C1	0.0364 (11)	0.0292 (10)	0.0274 (10)	0.0085 (9)	0.0120 (9)	0.0132 (9)
C2	0.0349 (11)	0.0279 (10)	0.0267 (10)	0.0035 (9)	0.0089 (9)	0.0099 (9)
C3	0.0318 (11)	0.0303 (10)	0.0281 (10)	0.0046 (8)	0.0080 (9)	0.0135 (9)
C4	0.0317 (10)	0.0310 (10)	0.0277 (10)	0.0094 (9)	0.0111 (9)	0.0138 (9)
C5	0.0326 (11)	0.0284 (10)	0.0286 (10)	0.0042 (8)	0.0088 (9)	0.0123 (9)
C6	0.0316 (10)	0.0303 (10)	0.0288 (10)	0.0059 (8)	0.0093 (9)	0.0148 (9)
C7	0.0332 (11)	0.0297 (10)	0.0286 (10)	0.0038 (9)	0.0080 (9)	0.0138 (9)
C8	0.0345 (11)	0.0304 (10)	0.0289 (10)	0.0070 (9)	0.0073 (9)	0.0153 (9)
C9	0.0299 (10)	0.0291 (10)	0.0288 (10)	0.0049 (8)	0.0084 (9)	0.0118 (9)
C10	0.0331 (11)	0.0312 (10)	0.0278 (10)	0.0026 (9)	0.0081 (9)	0.0129 (9)
C11	0.0346 (11)	0.0355 (11)	0.0291 (10)	0.0064 (9)	0.0078 (9)	0.0177 (9)
C12	0.0315 (11)	0.0293 (10)	0.0315 (11)	0.0068 (9)	0.0113 (9)	0.0127 (9)
C13	0.0405 (12)	0.0333 (11)	0.0360 (12)	0.0060 (10)	0.0126 (10)	0.0166 (10)
C14	0.0408 (12)	0.0313 (10)	0.0313 (10)	0.0069 (9)	0.0149 (10)	0.0114 (9)
C15	0.0367 (11)	0.0345 (11)	0.0284 (10)	0.0023 (9)	0.0116 (9)	0.0147 (9)
C16	0.0463 (13)	0.0356 (11)	0.0362 (12)	0.0108 (10)	0.0175 (11)	0.0155 (10)
C17	0.0472 (13)	0.0363 (12)	0.0346 (11)	0.0093 (10)	0.0193 (11)	0.0128 (10)
C18	0.0407 (12)	0.0390 (12)	0.0338 (11)	0.0078 (10)	0.0166 (10)	0.0173 (10)
C19	0.0383 (12)	0.0352 (11)	0.0371 (12)	0.0039 (9)	0.0138 (10)	0.0158 (10)
C20	0.0409 (12)	0.0360 (11)	0.0313 (11)	0.0061 (10)	0.0159 (10)	0.0156 (10)
C21	0.0354 (11)	0.0322 (10)	0.0276 (10)	0.0093 (9)	0.0133 (9)	0.0136 (9)
C22	0.0435 (13)	0.0348 (11)	0.0346 (11)	0.0047 (10)	0.0162 (10)	0.0172 (10)
C23	0.0465 (13)	0.0400 (12)	0.0311 (11)	0.0113 (10)	0.0170 (10)	0.0194 (10)
C24	0.0373 (12)	0.0378 (11)	0.0317 (11)	0.0083 (10)	0.0140 (10)	0.0160 (10)