Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Size, density of dots, and surface RMS roughness values are presented at different fluences
| Fluence (ions/cm2) | Size of dots (nm) | RMS roughness (nm) | Density (dots/cm2) |
|---|---|---|---|
| Pristine |
- |
0.2 |
- |
| 1 × 1017 |
18.4 ± 2.2 |
0.5 |
8 × 1010 |
| 3 × 1017 |
32.6 ± 2.2 |
0.6 |
2.8 × 1010 |
| 7 × 1017 | 24.6 ± 2.2 | 0.3 | 5.8 × 1010 |
RMS, root-mean-square.
