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. Author manuscript; available in PMC: 2013 Sep 1.
Published in final edited form as: J Micromech Microeng. 2012 Jul 26;22(9):095012. doi: 10.1088/0960-1317/22/9/095012

Figure 12.

Figure 12

Force resolution comparison between the present work and prior piezoresistive cantilevers operating in air. The fabrication and design advances described here enable a 10–20 fold improvement in force resolution or measurement bandwidth over prior devices of comparable thickness. The design and performance of the five devices from the present work are described in more detail in Table 1.