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. Author manuscript; available in PMC: 2013 Sep 1.
Published in final edited form as: J Micromech Microeng. 2012 Jul 26;22(9):095012. doi: 10.1088/0960-1317/22/9/095012

Figure 14.

Figure 14

Simultaneous actuation and sensing. (a) Time-domain crosstalk between the thermal actuator and piezoresistive sensor for a 1 V (1.6 mW) step filtered at 10 kHz for three different crosstalk compensation strategies that use an off-chip reference resistor, on-chip compensation force probe, or the compensation probe combined with a resistive compensation circuit. (b) Detailed view of the fully compensated crosstalk performance. The residual input referred crosstalk is 15 μV/mW (40 mK/mW). Capacitive coupling between the actuator and sensor is on the order of −90 dB at 10 kHz.