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Thermal actuator operation. (a) Simulated steady-state temperature profile and (b) deflection along the length of a force probe with a 61 μm long, 1 μm wide sensor and 60 μm long actuator operating in water. The Wheatstone bridge bias and actuator voltage are both 1 V. (c) The average piezoresistor temperature increases approximately 250 mK for the simulated conditions when the actuator is turned on, leading to thermal crosstalk between the actuator and sensor.
