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. Author manuscript; available in PMC: 2013 Sep 1.
Published in final edited form as: J Micromech Microeng. 2012 Jul 26;22(9):095012. doi: 10.1088/0960-1317/22/9/095012

Figure 5.

Figure 5

(a) Top and (b) side views of a fully assembled and passivated device. Two identical force probes are present on every silicon die. The main probe applies and senses mechanical forces while the compensation probe cancels out common-mode resistance changes from simultaneous actuator and sensor operation or ambient temperature fluctuations.