Figure 6.
Example thermomechanical noise spectrum for a 98 μm long and 2 μm wide force probe in air. The displacement noise spectral density of the probe is measured via LDV. The resonant frequency (f0 = 29.2 kHz), quality factor (Q = 3.3) and spring constant (kc = 1.4 pN/nm) are extracted by numerically fitting a model (3) to the data (solid line) consisting of a simple harmonic oscillator at thermal equilibrium (dashed line) and noise terms.