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. Author manuscript; available in PMC: 2013 Sep 1.
Published in final edited form as: J Micromech Microeng. 2012 Jul 26;22(9):095012. doi: 10.1088/0960-1317/22/9/095012

Figure 6.

Figure 6

Example thermomechanical noise spectrum for a 98 μm long and 2 μm wide force probe in air. The displacement noise spectral density of the probe is measured via LDV. The resonant frequency (f0 = 29.2 kHz), quality factor (Q = 3.3) and spring constant (kc = 1.4 pN/nm) are extracted by numerically fitting a model (3) to the data (solid line) consisting of a simple harmonic oscillator at thermal equilibrium (dashed line) and noise terms.