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. Author manuscript; available in PMC: 2013 Oct 23.
Published in final edited form as: Adv Funct Mater. 2012 Oct 23;22(20):4225–4235. doi: 10.1002/adfm.201200869

Figure 1.

Figure 1

Fabrication of discoidal porous silicon particles. A–D) Schematic process flow. E) SEM image of 1000 nm × 400 nm discoidal porous silicon particle array retained on a wafer. F) Released monodispersed 1000 nm × 400 nm discoidal porous silicon particle. Scale bars are 1 μm.