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. 2012 Oct 24;12(11):14232–14261. doi: 10.3390/s121114232

Table 2.

Development progress of CMOS polarization imager.

Project Author, Year Polarizer on Chip (Pitch)–Metal Type Pixel Size (μm2) Pixel Number Chip Size (μm2) Extinction Ratio (ER) SNR (dB) Micropolarizer Type and Direction Fabrication Process
Tokuda, 2009 [75] 1,200 μm 20 × 20 30 × 30 1,880 × 1,880 2.03 0.35 mm 2 poly 4 metal standard CMOS
Zhao, 2009 [73] 10 μm -polymer 100 four directions of polarization; 0°, 90°, 45° and −45° Spin coating and UV photo-lithography
Gruev, 2010 [76] 140 nm-Al 1,000 × 1,000 58 45 micropolarizers with four different orientations offset by 45°
Perkin, 2010 [78] 130 nm-Al 1,000 × 1,000 58 45 four polarizer filter array (0°, 45°, 90°, 135°)
Perkin, 2010 [78] 130 nm-Al 1,000 × 1000 58 45 two polarizer filter array (0°, 45°)
Gruev, 2010 [77] polymer 18 × 18 100 × 100 13 43.3 Dual tier polymer film with two different orientation offset by 45° 0.5 μm 2 poly 3 metal UMC CIS
Sarkar, 2010 [79,80] 480 nm 25 × 25 128 × 128 4,000 × 5,000 22 33 Combination of two types of micro-polarizer (first type: 2 direction of polarization; 0° and 90°; second: 3 direction of polarization; 0°, 45° and 90°) 0.18 μm 1 poly 3 metals UMC CIS