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. 2012 Nov 2;12(11):14838–14850. doi: 10.3390/s121114838

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© 2012 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 3. — Typical resistance versus power characteristic of the polysilicon heater on porous Si. The red line is a linear fit to the experimental data. The slope of the curve (resistance variation with power) is found to be 1.91 Ω/mW.