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Summary of the modifications made in the present study and the improvement in sensitivity compared to the 1G-MSS.
| Modifications | Improvement in Sensitivity |
|---|---|
| (1) Narrower sensing beams with thinner geometry | ∼40% |
| (2) Thinner passivation layers on piezoresistors | ∼40% |
| (3) Shallower piezoresistors with lower doping level | ∼10% |
| (4) Elimination of negative regions in piezoresistors | ∼30% |
| Total | ∼280% |
