Table 2.

Summary of the descriptions and values of the constants related to the intrinsic noises. The calculated total noises (V_Total) for 2G-MSS, 1G-MSS, and the piezoresistive cantilever are given at the bottom row.

Description	Symbol	Unit	Value
			2G-MSS	1G-MSS	Piezoresistive cantilever
Length of piezoresistor	lp	cm	20 × 10−4	20 × 10−4	90 × 10−4
Width of piezoresistor	wp	cm	3.8 × 10−4	3.8 × 10−4	8 × 10−4
Thickness of piezoresistor	tp	cm	0.3 × 10−4	0.5 × 10−4	0.1 × 10−4
Carrier density	p	cm−3	4 × 1018	8 × 1019	8 × 1019
Carrier mobility	μ	cm2/Vs	100	50	50
Hooge constant	α	-		106
Maximum frequency	fmax	Hz		3
Minimum frequency	fmin	Hz		0.1
Bridge bias voltage	VB	V		1.5
Temperature	T	K		293
Boltzmann constant	kB	J/K		1.38 × 10−23
Electron charge	q	C		1.60 × 10−19
Total noise	VTotal	V	6.37 × 10−7	1.01 × 10−7	3.76 × 10−8