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(a) The white light image of the USAF test target for group-elements 0-3, 0-4 and 0-5 corresponding to the line-widths of 397, 355 and 314 μm, respectively. (b) The SFVI image taken of a patterned bilayer imaged with a single lens and confocal stop. The CCD was placed an appropriate distance from the lens to produce a 1.4x magnification in the object size. Scale bars represent 1 mm.
