Table 1.

Surface roughness and FWHM of ω-scan for (0002) and (10–12) reflections of samples A and B

Sample	RMS surface	FWHM
		(arc sec)
	Roughness	MQW		GaN template
	(nm)	<0002>	<10-12>	<0002>	<10-12>
A	1.92	339	593	272.3	267
B	2.55	358	639	237	251

RMS, Root mean square.