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(a) The unit cell consists of four trapezoid metal stripes, one of which is located on the movable frames connected with the comb-drive actuator (green). The rest of the unit cell is located on the isolated islands (blue) fixed on the substrate. Inset shows the cross view of the unit cell. (b,c,d) The evolution of the unit cell when the movable trapezoid is shifted with the distance S=0, 2.5 and 5 μm, respectively, is shown.
