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. Author manuscript; available in PMC: 2013 Dec 18.
Published in final edited form as: Anal Chem. 2012 Nov 27;84(24):10665–10670. doi: 10.1021/ac3022967

Figure 1.

Figure 1

Characterization of semi-transparent substrates by SEM. (a) Top view. Pores are approximately 10 nm in diameter. (b) Cross sectional view. (c) Three pSi layers were etched on top of one another, and film thicknesses were measured. All film thickness values are presented in Table 1.