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. Author manuscript; available in PMC: 2013 Dec 12.
Published in final edited form as: Nano Lett. 2012 Nov 29;12(12):6107–6111. doi: 10.1021/nl3036349

Figure 2.

Figure 2

Actuator performance. (a) Example frequency response in air of a force probe with a resonant frequency of 303 kHz in air. (b) Tip deflection increases with sensor length due to mechanical amplification. The effective d31 coefficient of the 75 nm thick AlN actuator is approximately 1.3 pm/V. (c) Step response in saline of a parylene passivated force probe. The 10-90% rise time is 5 μs and the tip deflection is 22 nm/V.