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A. System diagram. RM: reference mirror. OL. objective lens. EC: environmental chamber. AO: analog output board. G: grating. IMAQ: image acquisition board. L: camera lens. LSC: line scan camera. SMF: single mode fiber. PC: personal computer. RAID: redundant array of independent disks. CL: Camera Link cable. B. Depth profile of mirror surface, indicating axial full-width half maximum of 1.3 µm.
