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Conceptual illustration of the process of forming self-enclosed cylindrical nanocapillaries: (a) triangular voids being trapped within rectangular trenches through non-conformal deposition of the glass filling; (b) and (c) the same voids after being transformed into first elliptical and then round capillaries via annealed glass reflow process; (d) continued reflow with the precise control of the reflow time shrinks the round capillaries into nanocapillaries.
