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SEM cross-sections of trenches having a nominal width of 1.5 μm, 2.0 μm, and 2.5 μm and depths (a) 2.5 μm and (b) 8 μm deposited with a 5 μm glass layer and underwent reflow at 1000 °C for (a) 2 h and (b) 4 h; scale bars: 5 μm. (c) Simulation plots mapping the velocity profile during 1000 °C reflow over different time intervals, showing the shape transformation of a void in a glass layer deposited 5 μm thick over a trench 2 μm wide and 8 μm deep.
