Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Schematic of the nanopore array fabrication process. Low Pressure CVD (LPCVD) process was employed to deposit a low-stress nitride layer above the bulk silicon substrate. A free-standing SiN membrane is fabricated using photolithography. Nanopore arrays were drilled through the SiN membrane using FIB milling. The pore size was measured using TEM. Reduction of the nanopore diameters to sub-10 nm range was achieved using ALD.
