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Capacitance stability of symmetrical SiNWs/SiNWs micro-ultracapacitors during galvanostatic charge/discharge cycling at ±5 μA cm−2. Capacitance stability of a) symmetrical bulk Si/Si micro-ultracapacitor and symmetrical SiNWs/SiNWs micro-ultracapacitors with b) 5 μm long SiNWs, c) 10 μm long SiNWs and d) 20 μm long SiNWs.
