Table 1.
Model condition and simulation parameters
| Condition | Parameter |
|---|---|
| Work material |
Germanium |
| Lattice constant |
a = 5.657 Å |
| Potential for germanium |
Tersoff potential |
| Potential of C-Ge |
Morse potential |
| |
De = 0.125778 eV, α = 2.58219 Å−1, 0 r0 = 2.2324 Å |
| Work dimensions |
45 × 27 × 12 nm |
| Tool-edge radius |
10 nm |
| Tool-nose radius |
10 nm |
| Tool clearance angle |
15° |
| Cutting direction |
on (010) surface |
| |
on (111) surface |
| Depth of cut |
1, 2, 3 nm |
| Cutting speed |
400 m/s |
| Bulk temperature | 293 K |