Table 2.

The uncut thickness in different combinations of depth of cut and lattice plane

Cutting direction	Cutting depth (nm)	Uncut thickness (nm)
$\left[\bar{1}00\right]$ on (010) surface	1	0.45-0.58
	2	0.87-1.01
	3	1.23-1.38
$\left[\bar{2}11\right]$ on (111) surface	1	0.35-0.58
	2	0.68-0.93
	3	1.07-1.28