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. Author manuscript; available in PMC: 2014 Jan 1.
Published in final edited form as: Adv Drug Deliv Rev. 2012 Oct 23;65(1):104–120. doi: 10.1016/j.addr.2012.10.003

Figure 7.

Figure 7

Step-Flash Imprint Lithography (S-FIL). A quartz mold with cavities of predesigned shapes is pressed against a photo-crosslinkable monomer solution on top of a silica wafer. A PVA layer is put beneath the polymer solution for the release of imprinted particles. The monomers are cross linked by applying UV light. Residual layer from crosslinking reaction is removed by oxygen plasma etching and particles are freed by dissolving away the PVA layer.