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. 2013 Jan 24;4(2):322–330. doi: 10.1364/BOE.4.000322

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©2013 Optical Society of America

This is an open-access article distributed under the terms of the Creative Commons Attribution-Noncommercial-No Derivative Works 3.0 Unported License, which permits download and redistribution, provided that the original work is properly cited. This license restricts the article from being modified or used commercially.

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Fig. 2 — MEMS 1-D (X-axis) resonant scanner. (a) Stereomicroscope image of mirror. Red spot represents reflected He-Ne (633nm) laser beam from gold coated reflective surface. Components: (1) hinge; (2) electric isolation trench; (3) link-arm struts; (4) sensor pad; (5) four weight-reducing holes; (6) electrostatic comb-drive actuators; (7) electric Au/Cr pad; (8) Au/Cr coated reflective mirror surface. (b) Frequency response of MEMS scanner is shown from sweeping the frequency with 10 Hz step size, forward (blue) and backward (red) with 40 V and 50% duty cycle. (c) Schematic of cross-sectional view of the MEMS 1-D scanner design for a 3 × 2 mm² SOI device with pattern gold coating using DRIE on the top and bottom layers.