Table 3.
The gravimetric sensitivity Sm and the limit of mass resolution Rm of the temperature compensated coupling configurations loaded on the AlN or SiC surface with a SiO2 film; λ(μm) is the numerical value of the acoustic wavelength expressed in μm.
| Structure | SiC (h/λ) | |||
|---|---|---|---|---|
| 0.1 | 0.2 | |||
|
| ||||
| a −Sm/λ(μm) (−cm2·g−1) | b Rm ·λ2 (μm) (10−13 g·cm−2) | c −Sm/λ(μm) (−cm2·g−1) | b Rm ·λ2 (μm) (10−13 g·cm−2) | |
| c-AlN/SiC(001)<100> | ||||
| SFT | 2,306; 2,770 | 1.41; 1.17 | 2,859; 3,609 | 1.39; 1.10 |
| SMFT | 2,384; 2,714 | 1.37; 1.20 | 2,804; 3,598 | 1.42; 1.11 |
| STF | 2,327; 2,775 | 1.39; 1.17 | 2,764; 3,624 | 1.44; 1.10 |
| STFM | 2,329; 2,979 | 1.40; 1.10 | 2,874; 3,395 | 1.39; 1.17 |
| c-AlN/SiC(001)<110> | ||||
| SFT | 3,693; 2,385 | 0.81; 1.26 | 3,160; 3,588 | 1.18; 1.04 |
| SMFT | 3,847; 2,351 | 0.78; 1.28 | 3,166; 3,567 | 1.17; 1.04 |
| STF | 3,808; 2,380 | 0.79; 1.27 | 3,084; 3,640 | 1.20; 1.02 |
| STFM | 3,718; 2,347 | 0.82; 1.29 | 3,234; 3,520 | 1.15; 1.06 |
a
for SiO2 h/λ = 0 ÷ 0.04.
b
f0 = v/λ, being v the velocity of the temperature compensated configuration.
c
for SiO2 h/λ = 0 ÷ 0.1.