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. Author manuscript; available in PMC: 2013 Mar 6.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Dec;58(12):2659–2667. doi: 10.1109/TUFFC.2011.2128

Fig. 2.

Fig. 2

Cross-section schematic of the CMUT on CMOS membrane and the critical metal interconnections made to CMOS electronics. Receive elements are connected and divided between multiplexers for receiver output signals and all receive elements are connected to a common DC bias. Dual ring arrays use four multiplexers, MUX1-4, to route one output from a group of 8 or 16 receive channels for parallel output.