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CMUT Integration Comparison
| CMUT in CMOS | Interleaved | Flip Chip | CMUT on CMOS | |
|---|---|---|---|---|
| Number of Processing Steps |
+ | + | − | − |
| Active CMUT Area Optimization | − | − | + | + |
| Processing Temperature | n/a | − | + | − |
| Gap Height Control | − | + | + | + |
| CMUT to CMOS Interconnect Assembly | + | + | − | + |
| Foundry Compatibility | + | − | n/a | n/a |
