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. 2012 Oct 30;7(1):604. doi: 10.1186/1556-276X-7-604

Table 2.

Oxidation states of the SiOxfilms obtained by means of the convolution of the XPS curves

    Oxidation states
Temperature (°C)
 dss (mm)
 Peak position (eV)
 
  
 Si0+
 Si2+
 Si3+
 Si4+
1,400
 2
 99.08
 101.06
 102.16
 102.95
1,300
 3
 99.67
  
 101.98
 103.01
1,150
 4
 99.08
 101.47
 102.51
 103.24
1,050
 5
 99.02
 101.32
 102.28
 103.16
900 6 99.90 101.36 102.01 103.34