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. Author manuscript; available in PMC: 2013 Oct 1.
Published in final edited form as: Sens Actuators B Chem. 2012 Oct;173:338–345. doi: 10.1016/j.snb.2012.07.022

Table 1.

The results of scaled EWD devices. The cross line means splitting failures.

Electrode size (μm) Gasket thickness (μm) Droplet size (pl) Dispensing voltage (Vrms) Splitting voltage (Vrms)
100 [10] 20 300 11.4a
15 200 17.7 17.7
33 5 18 17.1
3 12 17.1 18.7
21 3 5 22
a

The dielectric layer are 135 nm Ta2O5 and 180 nm parylene C.