Table 1.
The results of scaled EWD devices. The cross line means splitting failures.
Electrode size (μm) | Gasket thickness (μm) | Droplet size (pl) | Dispensing voltage (Vrms) | Splitting voltage (Vrms) |
---|---|---|---|---|
100 [10] | 20 | 300 | 11.4a | – |
15 | 200 | 17.7 | 17.7 | |
33 | 5 | 18 | 17.1 | – |
3 | 12 | 17.1 | 18.7 | |
21 | 3 | 5 | 22 | – |
The dielectric layer are 135 nm Ta2O5 and 180 nm parylene C.