Figure 1.

Chip fabrication and real pictures. (a) Fabrication process flow of a 3D integrated microfluidic chip: the lower and upper channels as well as the chip are fabricated separately before being plasma bonded; (b) real image of fabricated microfluidic chip containing 13 channels in a small area; (c) optical microscope image of the electrodes configuration in the region indicated by red dashed square in 1(b). The arrowhead shaped electrode is designed for trapping particles by AC signal, while the circle shaped electrodes are used for manipulating particles by DC signal.