Table 1.
Structure Property | Value |
---|---|
Pitch of the electrodes (λ/2) | 2 µm |
Electrode width (λ/4) | 1 µm |
Electrode height | 100 nm |
Si substrate height (10λ) | 40 µm |
Structure Property | Value |
---|---|
Pitch of the electrodes (λ/2) | 2 µm |
Electrode width (λ/4) | 1 µm |
Electrode height | 100 nm |
Si substrate height (10λ) | 40 µm |