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. 2013 Feb 6;13(2):2164–2175. doi: 10.3390/s130202164

Table 1.

Dimensions of the IDT and substrate.

Structure Property Value
Pitch of the electrodes (λ/2) 2 µm
Electrode width (λ/4) 1 µm
Electrode height 100 nm
Si substrate height (10λ) 40 µm