. 2013 Feb 6;13(2):2164–2175. doi: 10.3390/s130202164

Table 2.

Material constants used in the FEM simulation.

Material					Elastic Constants						Piezoelectric Stress Constants

	Density kg/m3	E GPa	Poisson's Ratio	Relative Permittivity	C11	C12	C13	C33	C44	C66	e15	e31	e33

					GPa	GPa	GPa	GPa	GPa	GPa	C/m2	C/m2	C/m2
Si (100)					2,330	131	0.27	11.7	-	-	-	-	-	-	-	-	-
ZnO (c-axis oriented)	5,720	-	-	ε₁₁ = 7.46	157	89	83	208	38	34	-0.45	-0.51	1.22
ZnO (c-axis oriented)	5,720	-	-	ε₃₃ = 8.59	157	89	83	208	38	34	-0.45	-0.51	1.22
Aluminium	2,700	70	0.35	-	-	-	-	-	-	-	-	-	-
PMMA	1,190	3.0	0.40	3.0
SU-8	1,190	4.02	0.22	3.0	-	-	-	-	-	-	-	-	-
SiO2	2,200	70	0.17	4.2	-	-	-	-	-	-	-	-	-