Table 1.

Deposition conditions of metal layers (Ti and Au) on the PDMS surface.

Parameter	Conditions
Vacuum	3×10 − 6 torr
Deposition rate of Ti	0.08 – 0.12 nm/s
Thickness of Ti	100 nm
Deposition rate of Au	0.08 – 0.12 nm/s
Thickness of Au	400 nm
E-beam focusing size	3 mm
E-beam power	7 kV