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The evolution of a) number concentration of coating monomers (bold lines) and particles (thin lines) and b) primary particle (bold lines) and collision (thin lines) diameter of coating particles for dpc = 40 nm and WF = 20 wt% for neglecting (solid and dash-dot lines) and accounting for HMDSO surface oxidation (dashed lines). Collision diameters are calculated with assuming smooth shells (solid and dashed lines) and fractal-like rough shells (dash-dot lines).
