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The evolution of a) coating efficiency (bold lines) and fraction of smooth coating (thin lines) and b) total (bold lines) and smooth (thin lines) coating thickness for dpc = 40 nm and WFSiO2 = 20 wt% for neglecting (solid and dash-dot lines) and accounting for HMDSO surface oxidation (dashed lines). Collision diameters are calculated assuming smooth (solid and dashed lines) or fractal-like rough shells (dash-dot lines).
