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. Author manuscript; available in PMC: 2013 Jun 5.
Published in final edited form as: Sens Actuators B Chem. 2010 Feb 4;145(2):807–816. doi: 10.1016/j.snb.2010.01.063

Fig. 2.

Fig. 2

(a) Optical photograph of perforated diaphragm pressure sensor array. Inset shows a scanning electron microscope (SEM) micrograph of one of the 1 mm × 1 mm sensors. (b) SEM micrograph showing the pores (d = 40 μm) etched into one quarter of the 1 mm × 1 mm sensor diaphragm.