U11	U22	U33	U12	U13	U23
Cl1	0.1280 (9)	0.0446 (5)	0.1266 (9)	−0.0192 (5)	−0.0106 (7)	0.0082 (5)
Cl2	0.0734 (5)	0.0782 (5)	0.0597 (4)	−0.0271 (4)	0.0197 (3)	0.0177 (4)
Cl3	0.0502 (4)	0.0720 (5)	0.1115 (7)	0.0207 (3)	0.0236 (4)	0.0361 (5)
S1	0.0363 (3)	0.0420 (3)	0.0365 (3)	0.0046 (2)	0.0158 (2)	0.0039 (2)
O1	0.0388 (9)	0.0760 (13)	0.0587 (11)	0.0094 (8)	0.0238 (8)	0.0034 (9)
O2	0.0531 (9)	0.0456 (10)	0.0438 (9)	0.0048 (7)	0.0153 (7)	0.0123 (7)
O3	0.0692 (11)	0.0324 (8)	0.0514 (10)	−0.0026 (8)	0.0397 (9)	0.0004 (7)
O4	0.0914 (14)	0.0287 (8)	0.0748 (13)	−0.0047 (8)	0.0580 (11)	−0.0055 (8)
N1	0.0380 (9)	0.0422 (10)	0.0303 (9)	0.0018 (7)	0.0167 (7)	0.0005 (7)
C1	0.0419 (11)	0.0449 (13)	0.0356 (11)	−0.0006 (10)	0.0111 (9)	−0.0023 (9)
C2	0.0446 (13)	0.0496 (15)	0.0468 (14)	−0.0081 (11)	0.0027 (11)	0.0017 (11)
C3	0.0639 (17)	0.0444 (16)	0.072 (2)	−0.0044 (13)	−0.0075 (15)	−0.0037 (14)
C4	0.095 (2)	0.070 (2)	0.070 (2)	0.0129 (19)	0.0098 (19)	−0.0296 (18)
C5	0.108 (3)	0.078 (2)	0.0594 (19)	0.012 (2)	0.0362 (19)	−0.0156 (17)
C6	0.0753 (18)	0.0590 (17)	0.0460 (14)	0.0016 (14)	0.0285 (13)	−0.0020 (12)
C7	0.0369 (10)	0.0302 (10)	0.0325 (10)	−0.0020 (8)	0.0148 (8)	−0.0012 (8)
C8	0.0405 (10)	0.0270 (10)	0.0336 (10)	−0.0026 (8)	0.0166 (8)	−0.0021 (8)
C9	0.0396 (11)	0.0391 (12)	0.0474 (13)	0.0024 (9)	0.0168 (10)	0.0002 (10)
C10	0.0369 (11)	0.0556 (15)	0.0568 (15)	−0.0089 (10)	0.0218 (11)	−0.0030 (12)
C11	0.0518 (14)	0.0530 (16)	0.0602 (16)	−0.0145 (11)	0.0257 (12)	0.0121 (12)
C12	0.0468 (13)	0.0401 (13)	0.0515 (14)	−0.0042 (10)	0.0161 (11)	0.0126 (10)
C13	0.0418 (11)	0.0297 (10)	0.0357 (11)	0.0013 (8)	0.0174 (9)	0.0012 (8)