Figure 8.
(a) The SEM image of a released sensor, (b) mechanical connection of proof mass pieces, and (c) anchors of the stator sensing fingers.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.