Table 2.

Geometric and material properties.

Symbols	Description	Values
E	Nickel's Young's Modulus (GPa)	160 [11,12]
Lm × Wm	Proof mass length and width (µm × µm)	1,000 × 1,300
Ls	Sensing finger length (µm)	300
Ws	Sensing finger width (µm)	10
t	Structure thickness (µm)	20
L × W	Springs length and width (µm × µm)	1,200 × 8
g	All sensing finger gaps (µm)	8.0
N	Number of sensing fingers	16 × 4