Table 1.
The system parameters used for modeling.
| Parameters | Value | Units |
|---|---|---|
| L | 486 | μm |
| L1 | 325 | μm |
| L2 | 360 | μm |
| b | 50 | μm |
| tb | 4 | μm |
| tp | 4 | μm |
| ρb | 2,330 | kg·m−3 |
| ρp | 6,390 | kg·m−3 |
| Eb | 105 | GPa |
| Ep | 104 | GPa |
| d31 | 11 | pC/N |
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