Figure 3. Transmission spectrum of the flexible ZnO/polyimide SAW devices with 4 (m thick ZnO film as a function of wavelength,
, (a) (
= 10 μm; (b) 12 μm; (c) 16 μm; (d) 20 μm; (e) 24 μm and (f) 32 μm.
Two well-defined resonant modes with high amplitude were obtained from all devices with different wavelengths. All the SAW devices have 20 pairs of IDT fingers.