Table 1.

Characteristic data for detectors using piezo-actuation or MEMS electrostatic actuation in a parallel plate or comb drive configuration as tuning actuation mechanisms.

	Piezo-Actuation	MEMS Parallel Plate	MEMS Comb Drive
Approximately DBR Reflectance	80%	80%	90%
Calculated Finesse (w/o absorber)	10 (27)	10 (27)	13 (55)
FWHM δλ [nm] (δλ/λ)	∼75 (1.5%)	∼100 (1.9%)	∼150 (3%)
Maximum Tuning Voltage [V]	128	25	62
Maximum Displacement [μm]	6	4.5	2.5
Optical Cavity Length [μm]	44 - 50	28.5 - 33	14.5 - 17
Minimum Air Gap [μm]	20	4	10
Tuning Range Δλ [μm]	4.55 - 4.85	4.85 - 5.15	4.7 - 5.4