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. 2008 Sep 17;8(9):5759–5774. doi: 10.3390/s8095759

Figure 7.

Figure 7.

SEM micrograph of Device Df1 used to determine (a) the dimensions of the interdigitated comb fingers: h is the thickness of SiC film; d is the gap between electrode and the interdigitated fingers; x is displacement and (b) the thickness of SiC film with highly oblique angle.