Table 1.
Temperature and UV Dose Rates of the Respective Plasma Treatment
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UV dose rates [in J/(m2×s)] |
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| Plasma (flux in sccm) | Power (in W) | Pressure (in Pa) | Hydrogen peroxide concentration (in %)a | Temperature increase (in °C)bafter 60/300 s | UVC (200–280 nm) | UVB (280–320 nm) | UVA (320–400 nm) | Total UV (200–400 nm) |
| H2 (20 sccm) | 100 | 5 | n.a. | 40±3/49±5 | 4.1 | 0.7 | 0.7 | 5.4 |
| H2 (20 sccm) | 400 | 5 | n.a. | 66±5/104±5 | 6.8 | 1.3 | 1.7 | 9.7 |
| H2 (20 sccm) | 400 | 25 | n.a. | 77±5/88±5 | 2.7 | 0.4 | 0.5 | 3.6 |
| H2/O2 (10:10 sccm) | 400 | 10 | n.a. | 77±5/110±5 | 4.2 | 2.0 | 1.8 | 8.0 |
| H2 (20 sccm) | 400 | 5 | 30 | 40±3/49±5 | 6.8 | 1.3 | 1.7 | 9.8 |
a
Four milliliters of 90°C heated and evaporated hydrogen peroxide in two concentrations (30% and 60%) were used for the spore inactivation. n.a.=not applied.
b
Starting temperature at time (0 s) was 20±2°C.