Figure 3. RBS data revealing that the obvious intermixing of Ti and Pt only occurred in thermally treated Pt(200 nm)/Ti(100 nm)/SiO₂/Si-substrates at 650°C.

The thermal treatments were the same as applied to sample Si-550 and Si-650 (Figure 2). The arrows mark the energy ranges of backscattering particles for the Ti signal and the Pt signal.