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(a) Schematic structure (a) and top-view structure (b) of the meta-molecule. (c) Top-view small-scale SEM image of the metamaterial. (d) Top-view small-scale SEM image of a 180-nm-thick ITO film. (e) AFM image of a 180-nm-thick ITO film. (f) Measured reflectance and transmission spectrum of a 180-nm-thick ITO film.
