Skip to main content
. Author manuscript; available in PMC: 2013 Aug 20.
Published in final edited form as: Nat Protoc. 2012 Apr 19;7(5):903–920. doi: 10.1038/nprot.2012.019

Figure 4.

Figure 4

Microfabrication of the SU-8 template for the PDMS flow cell. (A) Design of a 4-channel flow cell. On a 10cm wafer substrate (outline indicated by circle) 6 identical designs are placed. The outlines of 24mm × 60mm coverslips are shown as dashed lines. (B) Close-up view of one of the 4-channel designs. The distance between the inlet and outlet of a channel is 1cm and the width of each channel is 300μm. The channels are staggered and a reservoir is inserted to minimize the strain near the inlets and outlets. (C) A finished product. The template features are ~75μm high.