Figure 1.
Specialized parts created for FIB milling. (a) Shuttle designed to accept Polara TEM cartridges. (b) Polara cartridge inserted into specialized shuttle. (c) Shutter used to reduce contamination and frost protecting the Polara cartridge. (d) Comparison of the regular Polara cartridge (left) and specialized cartridge with channels to allow for lower milling angle. (e) SEM image of a mill, showing the x and y-axis in the SEM (white) and TEM stage (black), the red dashed arrow indicates milling direction. (f) TEM image of a mill, also showing the x and y axis of the SEM (white) and TEM stage (black), the TEM stage is at a 90° rotation to the FIB axis. The red dashed arrow indicates milling direction. The scale bars are (e) and (f) are 5μm and 1μm respectively.